Speaker
Description
The current materials science research and industrial development needs bring new challenges of analyzing unconventional samples inside a FIB-SEM, such as liquid form samples, solid liquid inter-face samples, and other soft and beam sensitive samples. Often, such materials tend to be air sen-sitive as well. Hence, an inert gas filled glove box is also needed in sample handling. Prior to the invention of cryogenic FIB, it was unimaginable to analyze such challenging samples in a FIB-SEM. The key components of a cryogenic workflow for 3D analysis and TEM sample fabrication include a cryo stage, a cryo nanomanipulator, a cryo transfer system and most importantly a cryo sample preparation station.
In this abstract we share the instrumental set up of a unique inert gas and cryogenic sample prepa-ration workflow. We will also present a variety of application usecases, for instance beam sensitive materials such as perovskite samples, liquid containing materials such as oil and water containing samples. The challenges in the cryo workflow development will be discussed. Various cryo and inert gas transfer workflow determined by sample types will also be illustrated. In addition, we will pro-vide an overview of the cryo instrumentation in the current market.